Web摘要： 本文采用cf_4、sf_6和nf_3三种腐蚀气体对硅进行反应离子腐蚀,研究了腐蚀表面粗糙度与腐蚀工艺条件(气压、射频功率),附加气体和腐蚀深度等因素之间的关系。 WebAmethistweg 5 2665 NT Bleiswijk The Netherlands Phone +31 79 82 000 20 [email protected]. Chambre of Commerce: 27360813 VAT number: NL821503212B01

Removal of CF4 from NF3 at the phase interface

WebSiF4, CF4, COF2and CO2were detected as products in C3F6cleaning. C3F6cleaning time was the same as C2F6cleaning. MMTCE of C3F6cleaning was reduced to under 5 % of … WebSF4 and NF3 only Indicate the designation for the hybrid orbitals formed from each of the following combinations of atomic orbitals: (i) one s and two p (ii) one s, three p, and one d -sp and spd -sp2 and sp3d -sp2 and sp2d -sp and sp2d -sp2 and spd sp2 and sp3d gray leather l shaped sofa

四氟化碳_化工百科

WebDec 21, 2024 · Tables 6.3 and 6.4 include two entries for NF3: Remote-NF3 and NF3. The first refers to a cleaning method in which the film cleaning-agents formed from NF3 (F-atoms) are produced in a plasma upstream (remote) from the chamber being cleaned. WebCharacterization of NF3 Chamber Cleans on Multiple CVD Platforms Author: Brian Goolsby, Victor Vartanian, Laura Mendicino, Jason Rivers, Jason Vi res, Michael Turner, Sey-Ping … WebNF3 モル質量 71.0019 g/mol 外観 無色の気体 密度 3.003 kg/m3(1 atm, 15 ℃) 1.885 g/cm3(liquid at b.p.) 融点 −207.15 °C, 66 K, -341 °F 沸点 −129.1 °C, 144 K, -200 °F 水への溶解度 0.021 vol/vol (20 ℃, 1 bar) 構造 分子の形 trigonal pyramidal 双極子モーメント 0.234 D 危険性 安全データシート(外部リンク) Air Liquide MSDS EU Index 掲載なし NFPA 704 … gray leather living room furniture sets